MOSFET Threshold Voltage Calculator

Calculate NMOS threshold voltage, oxide capacitance, Fermi potential, and body-effect coefficient from physical device parameters.

Physical threshold-voltage model
Enter oxide thickness, p-type substrate doping, temperature, flat-band voltage, and nonnegative source-body bias.

About MOSFET threshold voltage

Threshold voltage is the gate-source voltage at which a MOS structure forms a strong inversion layer capable of conducting between source and drain. It is not a perfectly sharp on-off boundary, because measurable subthreshold current exists below it, but it remains one of the most important parameters in digital timing, analog biasing, leakage control, and device fabrication. Threshold depends on material properties, oxide geometry, substrate doping, terminal bias, temperature, and trapped charge. This calculator uses a standard idealized NMOS body-effect model. Gate oxide capacitance per unit area is oxide permittivity divided by oxide thickness. A thinner oxide produces larger capacitance and stronger electrostatic gate control. The Fermi potential is derived from thermal voltage and the logarithm of acceptor doping relative to intrinsic carrier concentration. The body-effect coefficient combines silicon permittivity, electronic charge, substrate concentration, and oxide capacitance. At zero source-body bias, the threshold estimate is flat-band voltage plus twice the Fermi potential plus the depletion-charge term. Applying a positive source-to-body voltage increases depletion depth and therefore raises threshold voltage. This is the body effect. The model assumes a uniformly doped p-type silicon substrate, silicon dioxide with relative permittivity 3.9, silicon relative permittivity 11.7, and an intrinsic carrier concentration of 1.45 × 10¹⁶ per cubic metre. Doping entered per cubic centimetre is converted internally to SI units. Flat-band voltage captures the work-function difference and effective oxide charge. It is often negative for an NMOS process but varies widely with gate material, substrate, fixed charge, and manufacturing details. Use a value from process documentation, a fitted device model, or a carefully characterized capacitor. Guessing this input can shift the final threshold substantially even when oxide and doping values are precise. This equation is useful for education, process exploration, and first-order comparisons, not for signing off a fabricated design. Modern short-channel devices exhibit drain-induced barrier lowering, quantum confinement, nonuniform profiles, poly depletion, mobility effects, and temperature-dependent intrinsic concentration. Production compact models account for these details and are calibrated to measurements. Also note that threshold extraction methods differ: constant-current, linear extrapolation, and transconductance methods may report different values for the same transistor. Treat the result as a physically informed estimate and verify it against the relevant process model.

Threshold-voltage examples

Device inputsExpected trendInterpretation
2 nm, 1e17 cm⁻³, 300 K, Vfb -0.5 V, Vsb 0 VVth 0.409 V; Cox 0.01727 F/m²High oxide capacitance gives strong gate control.
5 nm, 5e16 cm⁻³, 300 K, Vfb -0.4 V, Vsb 1 VVth 0.627 V; Cox 0.00691 F/m²Positive body bias raises the depletion contribution.
10 nm, 1e17 cm⁻³, 350 K, Vfb -0.6 V, Vsb 0.5 VVth 0.985 V; Cox 0.00345 F/m²Lower oxide capacitance increases the body coefficient.

How to calculate threshold voltage

  1. Enter gate oxide thickness in nanometres and substrate doping per cubic centimetre.
  2. Enter absolute temperature and the process flat-band voltage.
  3. Enter source-body bias, using zero when source and body are tied.
  4. Select Calculate Threshold Voltage and review threshold and intermediate physical parameters.

MOSFET threshold voltage FAQ

What is gate oxide capacitance?

It is oxide capacitance per unit gate area, calculated from permittivity divided by thickness. Thinner oxide increases capacitance and gate control.

Why does body bias raise threshold voltage?

Reverse source-body bias widens the depletion region and increases depletion charge. The gate must supply more voltage to reach strong inversion.

Where can I find flat-band voltage?

Use process documentation, a compact transistor model, or characterization data. It depends on work functions and effective oxide charge, so it is not universal.

Does temperature affect threshold voltage?

Yes, temperature changes thermal voltage and intrinsic carrier concentration. This simplified tool varies thermal voltage but holds intrinsic concentration fixed for transparency.

Is this model accurate for modern transistors?

It captures essential long-channel electrostatics but omits important short-channel and quantum effects. Use a foundry-calibrated compact model for production design.